Calibration of phase-shift interferometer

Der-Shen Wan; Wen-Shang Chiang; Ming-Wen Chang

doi:10.1117/12.132175

20 October 1992 Calibration of phase-shift interferometer

Der-Shen Wan, Wen-Shang Chiang, Ming-Wen Chang

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132175
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

For thin film technology, the thickness of a thin film can be controlled and measured very accurately, which supplies a standard for the calibration of a phase shift interferometer. We use a one-eight wave thin film to calibrate the 90 degree(s) phase shift for a phase shift interferometer. The interferometer is also used to measure the thickness of a thin film for checking its accuracy.

Citation Download Citation

Der-Shen Wan, Wen-Shang Chiang, and Ming-Wen Chang "Calibration of phase-shift interferometer", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132175

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