Low-threshold GaAlAs/GaAlAs ridge waveguide lasers with dry-etched facets

Szutsun Simon Ou; Jane J. Yang; Michael Jansen; Moshe Sergant; Cynthia A. Hess; Chan A. Tu

doi:10.1117/12.139917

24 August 1992 Low-threshold GaAlAs/GaAlAs ridge waveguide lasers with dry-etched facets

Szutsun Simon Ou, Jane J. Yang, Michael Jansen, Moshe Sergant, Cynthia A. Hess, Chan A. Tu

Proceedings Volume 1704, Advances in Optical Information Processing V; (1992) https://doi.org/10.1117/12.139917
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

Low-threshold, high-performance dry-etched ridge waveguide lasers with dry etched facets are of interest for monolithic two-dimensional coherent applications such as optical interconnects and optoelectronic integrated circuits. We report on low threshold current and wavelength emission < 8000 angstroms laser diodes with short cavity and dry etched facets. The facets are fabricated by reactive ion etching, which provides nearly vertical walls. For the first time, coherent GaAlAs/GaAlAs laser diodes (emission wavelength 7940 angstroms at room temperature) with cw threshold currents as low as 4 mA (room temperature) and 0.8 mA (at 77 degree(s)K) were achieved on a 4-micrometers -wide, 100-micrometers -long device.

Citation Download Citation

Szutsun Simon Ou, Jane J. Yang, Michael Jansen, Moshe Sergant, Cynthia A. Hess, and Chan A. Tu "Low-threshold GaAlAs/GaAlAs ridge waveguide lasers with dry-etched facets", Proc. SPIE 1704, Advances in Optical Information Processing V, (24 August 1992); https://doi.org/10.1117/12.139917

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