Buffer layers for deposition of superconducting YBaCuO thin film on polycrystalline diamond

Charles P. Beetz Jr.; G. J. Cui; B. A. Lincoln; Peter S. Kirlin

doi:10.1117/12.137792

1 September 1992 Buffer layers for deposition of superconducting YBaCuO thin film on polycrystalline diamond

Charles P. Beetz Jr., G. J. Cui, B. A. Lincoln, Peter S. Kirlin

Proceedings Volume 1685, Infrared Detectors and Focal Plane Arrays II; (1992) https://doi.org/10.1117/12.137792
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

In an attempt to combine the properties of high temperature superconductors with the high thermal conductivity and low specific heat of diamond, we have explored the deposition of in- situ YBa₂Cu₃O_7-(delta ) (YBCO) superconducting films on polycrystalline diamond thin films. We demonstrate for the first time superconducting YBCO films on diamond employing multiple layer buffer layer systems. Three different composite buffer layer systems were explored for this purpose: (1) Diamond/Zr/YSZ/YBCO, (2) Diamond/Si₃N₄/YSZ/YBCO, and (3) Diamond/SiO₂/YSZ/YBCO. Adherent thin Zr films were deposited by dc sputtering on the diamond films at 450 to 820 degree(s)C. The yttria stabilized zirconia (YSZ) was deposited by reactive RF sputtering at 680 to 750 degree(s)C. The Si₃N₄ and SiO₂ were also deposited by on-axis RF sputtering at 400 to 700 degree(s)C. YBCO films were grown on the buffer layers by off-axis RF sputtering at substrate temperatures between 690 degree(s)C and 750 degree(s)C. In all cases, the as-deposited YBCO films were superconducting above 77 K. This demonstration enables the fabrication of low heat capacity, fast response time bolometric far IR detectors and paves the way for the use of HTSC as a high frequency interconnect metallization on thick diamond film based multichip modules.

Citation Download Citation

Charles P. Beetz Jr., G. J. Cui, B. A. Lincoln, and Peter S. Kirlin "Buffer layers for deposition of superconducting YBaCuO thin film on polycrystalline diamond", Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); https://doi.org/10.1117/12.137792

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available