Paper
1 February 1992 Protecting vibration environments with zoning and land-use ordinances
Ramon E. Nugent, Hal Amick
Author Affiliations +
Abstract
The paper reviews the vibration issues which should be considered in siting high-technology facilities and proposes some guidelines for ordinances which address these issues.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ramon E. Nugent and Hal Amick "Protecting vibration environments with zoning and land-use ordinances", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56827
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KEYWORDS
Buildings

Microelectronics

Metrology

Vibration control

Particles

Data processing

Manufacturing

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