Cluster tool technology

John R. Hauser; Syed A. Rizvi

doi:10.1117/12.56620

1 January 1992 Cluster tool technology

John R. Hauser, Syed A. Rizvi

Proceedings Volume 1594, Process Module Metrology, Control and Clustering; (1992) https://doi.org/10.1117/12.56620
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

A review is presented of cluster tool concepts, their potential advantages for future IC manufacturing, approaches to cluster tools and cluster tool technologies. As wafer size increases and device feature size decreases, cluster tools should play a more central role in future IC manufacturing, although there are several problems to be overcome before cluster tools are available for a broad spectrum of IC technologies.

Citation Download Citation

John R. Hauser and Syed A. Rizvi "Cluster tool technology", Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); https://doi.org/10.1117/12.56620

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