ECR plasma and etch characterization of photoresist dry etch processes

Kyoung Youn Cho; Dong Won Im

doi:10.1117/12.56918

1 February 1992 ECR plasma and etch characterization of photoresist dry etch processes

Kyoung Youn Cho, Dong Won Im

Proceedings Volume 1593, Dry Etch Technology; (1992) https://doi.org/10.1117/12.56918
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

Photoresist dry etching processes by a down-stream type ECR plasma etcher were characterized. The etched photoresist profile and etch rates were obtained by scanning electron microscope (SEM) photographs and an optical thickness monitoring instrument, respectively. The mask used for PR etch tests has 1 um pitched line & space patterns. It was found that C12 addition to 02 plasma can passivate PR side walls. The etch profiles of PR vary critically with the main coil current changes. The etch rate has maximum of 4800 Å/min and the etch uniformity has a minimum value of 5.4 %. The dc bias voltage (Vdc) variations are closely related to the etch profiles. Vdc decreases when PR etching is completed and substrates are exposed to the plasma. The wafers with different thin film materials induce different Vdc for a same process condition. The plasma properties were measured by a Langmuir probe. The N2 addition to 02 plasma were also tested. However, the critical effect of the main coil current was not found for the N2 processes. A model was formulated to explain the difference between C12 processes and N2 processes with an equivalent circuit method.

Citation Download Citation

Kyoung Youn Cho and Dong Won Im "ECR plasma and etch characterization of photoresist dry etch processes", Proc. SPIE 1593, Dry Etch Technology, (1 February 1992); https://doi.org/10.1117/12.56918

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available