Method for characterizing multilayer coatings on curved substrates

George Gutman; Kevin Parker; James Scholhamer; James L. Wood

doi:10.1117/12.51216

1 January 1992 Method for characterizing multilayer coatings on curved substrates

George Gutman, Kevin Parker, James Scholhamer, James L. Wood

Proceedings Volume 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics; (1992) https://doi.org/10.1117/12.51216
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The x-ray characterization of multilayer coatings at very low angles on curved substrates is limited by the radius of curvature and surface dimensions. Plane and cylindrical multilayers were manufactured in the same process and characterized as deposited. After flattening the cylindrical surface and curving the plane surface, the same were recharacterized. These measurements and the techniques used to characterize cylindrical surfaces are discussed with the goal of developing techniques for future application to the characterization of spherical, elliptical, or paraboloidal surfaces.

Citation Download Citation

George Gutman, Kevin Parker, James Scholhamer, and James L. Wood "Method for characterizing multilayer coatings on curved substrates", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); https://doi.org/10.1117/12.51216

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