Optical emission spectroscopy in diamond-like carbon film deposition by glow discharge

Wei Ping Zhang; Jing Chen; Rong Chuan Fang; Ke Ling Hu

doi:10.1117/12.47266

1 November 1991 Optical emission spectroscopy in diamond-like carbon film deposition by glow discharge

Wei Ping Zhang, Jing Chen, Rong Chuan Fang, Ke Ling Hu

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47266
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

We have measured the optical emission spectra of glow discharge plasma of methane in the diamond-like carbon film deposition and analyzed the relationship between the optical emission spectra and deposition parameters, such as rf power and gas pressure. The infrared absorption of films has also been measured and compared with the results of optical emission spectra measurements.

Citation Download Citation

Wei Ping Zhang, Jing Chen, Rong Chuan Fang, and Ke Ling Hu "Optical emission spectroscopy in diamond-like carbon film deposition by glow discharge", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47266

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