Structure of poly(p-hydroxystyrene) film

Minoru Toriumi; Masatoshi Yanagimachi; Hiroshi M. Masuhara

doi:10.1117/12.46394

1 June 1991 Structure of poly(p-hydroxystyrene) film

Minoru Toriumi, Masatoshi Yanagimachi, Hiroshi M. Masuhara

Proceedings Volume 1466, Advances in Resist Technology and Processing VIII; (1991) https://doi.org/10.1117/12.46394
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

Pyrene-doped poly(p-hydroxystyrene) (PHST) thin films prepared by spin- coating method are studied by time-resolved total-internal-reflection fluorescence spectroscopy. We observed inhomogeneity such as a concentration gradient of doped pyrene molecules and a gradient of polarity (hydrophobicity), and also the existence of isolated pyrene molecules. Stable ground-state dimers of pyrene are found in surface, bulk, and interface layers of a PHST film. These features cause the complicated rise and decay of fluorescence. These results also depend upon the preparing process such as the baking condition.

Citation Download Citation

Minoru Toriumi, Masatoshi Yanagimachi, and Hiroshi M. Masuhara "Structure of poly(p-hydroxystyrene) film", Proc. SPIE 1466, Advances in Resist Technology and Processing VIII, (1 June 1991); https://doi.org/10.1117/12.46394

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