Dislocation mechanism of periodical relief formation in laser-irradiated silicon

Galina D. Shandybina

doi:10.1117/12.48174

1 December 1991 Dislocation mechanism of periodical relief formation in laser-irradiated silicon

Galina D. Shandybina

Proceedings Volume 1440, Optical Radiation Interaction with Matter; (1991) https://doi.org/10.1117/12.48174
Event: Optical Radiation Interaction with Matter, 1990, Leningrad, Russian Federation

Abstract

The dynamics of surface relief changes and thermal deformation in semiconductors are investigated with respect to radiation power density during laser pulses. A thermomechanical model of periodical relief formation is suggested.

Citation Download Citation

Galina D. Shandybina "Dislocation mechanism of periodical relief formation in laser-irradiated silicon", Proc. SPIE 1440, Optical Radiation Interaction with Matter, (1 December 1991); https://doi.org/10.1117/12.48174

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