Electrical And Optical Properties Of Sputter-Deposited Materials

W. T. Pawlewicz; N. Laegreid

doi:10.1117/12.956279

26 September 1978 Electrical And Optical Properties Of Sputter-Deposited Materials

W. T. Pawlewicz, N. Laegreid

Proceedings Volume 0140, Optical Coatings: Applications and Utilization II; (1978) https://doi.org/10.1117/12.956279
Event: 1978 Technical Symposium East, 1978, Washington, D.C., United States

Abstract

Data are provided to demonstrate that metals, semiconductors, and insulators can be sputter deposited to obtain preselected properties. Semiconductors and insulators such as CdTe, CdS, In2-x SnxO3, TiO2 and a-Si have been controllably and reproducibly deposited to obtain a wide spectrum of electrical and optical properties. Electrical resistivity and optical absorption have been related to compositional and structural properties. Metals such as Cu and Ag have been deposited for the purpose of achieving damage-resistant high reflectivity surfaces for high energy laser applications. A sputter deposited, mechanically polishable, damage-resistant mirror material with high reflectivity was developed.

Citation Download Citation

W. T. Pawlewicz and N. Laegreid "Electrical And Optical Properties Of Sputter-Deposited Materials", Proc. SPIE 0140, Optical Coatings: Applications and Utilization II, (26 September 1978); https://doi.org/10.1117/12.956279

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