Study of high-average-power excimer laser with circulation loop

Bruno Godard; Emmanuel Estocq; Marc X. Stehle; Jean C. Bonnet; Daniel R. Pigache

doi:10.1117/12.25976

1 February 1991 Study of high-average-power excimer laser with circulation loop

Bruno Godard, Emmanuel Estocq, Marc X. Stehle, Jean C. Bonnet, Daniel R. Pigache

Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.25976
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain

Abstract

Preliminary studies of an high average power, high energy per pulse, X-ray preionized XeCl laser are presented. A parametric study is given (efficiency and energy per pulse as a function of pressure, charging voltage, capacitance and X-ray dose). We obtained 4 Joules per pulse and the maximum efficiency is 2.5% with 1.7 J. With a circulation loop, 80 Watts has been reached.

Citation Download Citation

Bruno Godard, Emmanuel Estocq, Marc X. Stehle, Jean C. Bonnet, and Daniel R. Pigache "Study of high-average-power excimer laser with circulation loop", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); https://doi.org/10.1117/12.25976

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