2.5 kHz high-repetition-rate XeCl excimer laser

Ken Ishikawa; S. Takagi; Naomichi Okamoto; K. Kakizaki; Saburoh Satoh; Tatsumi Goto

doi:10.1117/12.25986

1 February 1991 2.5 kHz high-repetition-rate XeCl excimer laser

Ken Ishikawa, S. Takagi, Naomichi Okamoto, K. Kakizaki, Saburoh Satoh, Tatsumi Goto

Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.25986
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain

Abstract

An XeCl excimer laser was operated at the high repetition rate of 2.5 kHz, which can circulate the laser gas up to 100 m/s uniformly and efficiently. The stable operation at the highest repetition rate, 2.5 kHz, has been attained in Ne buffer at a gas flow rate of 54 m/s with an average laser power of 87 W

Citation Download Citation

Ken Ishikawa, S. Takagi, Naomichi Okamoto, K. Kakizaki, Saburoh Satoh, and Tatsumi Goto "2.5 kHz high-repetition-rate XeCl excimer laser", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); https://doi.org/10.1117/12.25986

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