Soft x-ray spectro-microscope

Juan Carlos Campuzano; Guy Jennings; L. Beaulaigue; Brian G. Rodricks; Christine M. Brizard

doi:10.1117/12.23317

1 January 1991 Soft x-ray spectro-microscope

Juan Carlos Campuzano, Guy Jennings, L. Beaulaigue, Brian G. Rodricks, Christine M. Brizard

Proceedings Volume 1345, Advanced X-Ray/EUV Radiation Sources and Applications; (1991) https://doi.org/10.1117/12.23317
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

An X-ray photoelectron microscope capable of providing both spatial and chemical information on the nature of a sample has been developed. Photons from the Aladdin Synchrotron are monochromatized by an extended-range Grasshopper monochromator covering the range from 40 to 1500 eV with an energy resolution between 10 and 200 meV. The monochromatized radiation generates photoelectrons in the sample, which is energy-analyzed with a resolving power E/delta E greater than 50,000 and imaged by a multichannel plate array. The visible image is transferred to a computer by a virtual-phase charge-coupled device camera with a dynamic range of 4096:1. Preliminary coarse measurements indicate a spatial resolution of the instrument better than 1 micron, although a limit of 600 A is possible. The instrument provides chemical shift-resolved images of low-lying core levels in a variety of samples.

Citation Download Citation

Juan Carlos Campuzano, Guy Jennings, L. Beaulaigue, Brian G. Rodricks, and Christine M. Brizard "Soft x-ray spectro-microscope", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); https://doi.org/10.1117/12.23317

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