Formation of controllable 1D and 2D subwavelength structures on 4H-SiC by delayed triple femtosecond laser pulse irradiation

Wanlin He; Yanjun Qin

doi:10.1117/12.3050257

18 November 2024 Formation of controllable 1D and 2D subwavelength structures on 4H-SiC by delayed triple femtosecond laser pulse irradiation

Wanlin He, Yanjun Qin

Author Affiliations +

Proceedings Volume 13398, Fourth International Conference on Optics and Communication Technology (ICOCT 2024); 133980L (2024) https://doi.org/10.1117/12.3050257
Event: Fourth International Conference on Optics and Communication Technology (ICOCT 2024), 2024, Nanjing, China

Abstract

The fabrication of subwavelength two-dimensional (2D) structures on the surface of bulk materials holds immense importance in the field of nanophotonics. We present a novel one-step technique for fabricating 2D-microbump structures on semiconductor 4H-SiC surface, utilizing three femtosecond laser beams with temporally delayed pulses. Various surface structures, including one-dimensional (1D) ripple structures, 2D composite ripple structures, and 2D square/rhombus-microbump structures, were uniformly distributed across the laser-irradiated areas, which were conspicuously characterized by their low spatial frequency. The fabrication of the 2D structure can be controlled by adjusting the delay time among the three laser beams, and a physical scenario utilizing surface plasmon polariton is proposed to elucidate the underlying mechanisms.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wanlin He and Yanjun Qin "Formation of controllable 1D and 2D subwavelength structures on 4H-SiC by delayed triple femtosecond laser pulse irradiation", Proc. SPIE 13398, Fourth International Conference on Optics and Communication Technology (ICOCT 2024), 133980L (18 November 2024); https://doi.org/10.1117/12.3050257

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE