Real-time wavefront measurement with lambda/10 fringe spacing for the optical shop

Klaus R. Freischlad; Michael F. Kuechel; Karl-Heinz Schuster; Ulrich Wegmann; Winfried M. Kaiser

doi:10.1117/12.51047

1 January 1991 Real-time wavefront measurement with lambda/10 fringe spacing for the optical shop

Klaus R. Freischlad, Michael F. Kuechel, Karl-Heinz Schuster, Ulrich Wegmann, Winfried M. Kaiser

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51047
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

We will report on a new interferometer developed at Carl Zeiss, which has real-time measuring capability with instant visualization of results, is nearly insensitive to vibrations, has a variable fringe spacing from one lambda to lambda/1O (lambda represents the wavelength of the light used in the interferometric test), and can give lambda/100 accuracy through a simple calibration procedure. It can be handled with the same ease and in just the same way as conventional interferometers.

Citation Download Citation

Klaus R. Freischlad, Michael F. Kuechel, Karl-Heinz Schuster, Ulrich Wegmann, and Winfried M. Kaiser "Real-time wavefront measurement with lambda/10 fringe spacing for the optical shop", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51047

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