Design review of a vacuum cryogenic scatterometer

Tom Matovich; John C. Stover; Jeffrey Rifkin

doi:10.1117/12.22655

1 December 1990 Design review of a vacuum cryogenic scatterometer

Tom Matovich, John C. Stover, Jeffrey Rifkin

Proceedings Volume 1331, Stray Radiation in Optical Systems; (1990) https://doi.org/10.1117/12.22655
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

This paper reviews design goals for an infrared scatterometer being built to measure cryogenically cooled samples. The instrument, which will be installed in the Optical Characterization Facility at Oak Ridge National Laboratory, will be capable of operation at both 3.39 and 1 0.6 micrometers for both reflective and transmissive samples up to six inches in diameter. BSDF is measured through the specular beam and out to grazing scatter angles. The paper gives simulated instrument signatures obtained in TMA's measurement facility.

Citation Download Citation

Tom Matovich, John C. Stover, and Jeffrey Rifkin "Design review of a vacuum cryogenic scatterometer", Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); https://doi.org/10.1117/12.22655

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