Studies of defects in diamond films and particles by Raman and luminescence spectroscopies

Lawrence H. Robins; Edward N. Farabaugh; Albert Feldman

doi:10.1117/12.22452

1 December 1990 Studies of defects in diamond films and particles by Raman and luminescence spectroscopies

Lawrence H. Robins, Edward N. Farabaugh, Albert Feldman

Proceedings Volume 1325, Diamond Optics III; (1990) https://doi.org/10.1117/12.22452
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Diamond films grown under a variety of deposition conditions in hot-filament or microwave-plasma CVD reactors were characterized by Raman and cathodoluminescence (CL) spectroscopies. The magnitudes of the following four Raman spectral features were observed to vary from specimen to specimen in a correlated manner: (1) the linewidth of the diamond Raman line (2) the intensity of the tails of the diamond Raman line at several half-widths from the peak (3) the intensity ratio of the sp2-bonded carbon Raman band to the diamond Raman line and (4) the intensity ratio of the broad photoluminescence (PL) background that underlies the Raman spectrum to the diamond Raman peak. We suggest that each of these features varies with the abundance of sp2-bonded carbon. As a function of deposition conditions the sp2-bonded carbon content increases with methane fraction and with substrate temperature and decreases with oxygen fraction. A cyclic variation with deposition time is observed for one set of hot-filament depositions. The CL spectra of these specimens consist of several distinct components attributed to impurities point defects and dislocations. The CL intensity is found to be vary from specimen to specimen approximately inversely with the intensity of the visible-excited PL background in the Raman region. This correlation is strongest for the dislocation-related 2. 85 eV CL band. A model of competing recombination between two sets of defects is proposed to explain the inverse correlation. 1 .

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Lawrence H. Robins, Edward N. Farabaugh, and Albert Feldman "Studies of defects in diamond films and particles by Raman and luminescence spectroscopies", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22452

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