Paper
1 December 1990 KrF excimer laser deposition of diamond-like carbon films with germanium interlayers
Author Affiliations +
Abstract
We have investigated the process of UV laser evaporation of diamond-like carbon films on metallic and semiconducting alloys. High purity targets in vacuum were irradiated with a pulsed KrF excimer laser beam (248 nm). Adhesion of diamond-like carbon films to several materials was improved by applying in situ germanium interlayers. Various process parameters were varied to determine the optimum conditions for deposition. The diamond-like films and germanium interlayers were structurally characterized by inelastic light scattering and scanning electron microscopy. Mechanical properties such as indenter hardness and friction coefficient were also measured. Preliminary results indicate that films deposited at low substrate temperature and high laser fluence have superior mechanical properties.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard T. Demers and Dennis G. Harris "KrF excimer laser deposition of diamond-like carbon films with germanium interlayers", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22446
Lens.org Logo
CITATIONS
Cited by 2 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Germanium

Carbon

Crystals

Raman spectroscopy

Silicon films

Excimer lasers

Silicon

RELATED CONTENT

Pulsed Laser Deposition Of Amorphous Carbon Films
Proceedings of SPIE (January 15 1989)
Electronic materials via laser radiation
Proceedings of SPIE (November 10 2003)
Growth of Si1 yCy Si and Si1 x yGexCy Si...
Proceedings of SPIE (May 09 1997)
Synthesis of diamond on WC Co substrates using a KrF...
Proceedings of SPIE (March 20 2007)

Back to Top