Form measurement of slightly curved surfaces with diameters up to 1.5 meters based on an optical subaperture method

Gerd Ehret; Armin Zörkler; Jan Spichtinger

doi:10.1117/12.3037860

20 November 2024 Form measurement of slightly curved surfaces with diameters up to 1.5 meters based on an optical subaperture method

Gerd Ehret, Armin Zörkler, Jan Spichtinger

Author Affiliations +

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 1324102 (2024) https://doi.org/10.1117/12.3037860
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

PTB is currently developing and setting up a new form measurement system for large optical surfaces with diameters up to 1.5 m. One objective is to measure flat surfaces with standard uncertainties of a few ten nanometers. Another objective is the form measurement of slightly curved specimens with a radius of curvature of 10 m or more with standard uncertainties below 1 μm. The new system will measure the specimen's topography in subapertures. Information is needed about the position and angle of each subaperture, so that the measurement errors of individual subapertures measurements do not lead to larger errors in the complete topography. For the measurement of slightly curved specimens, a highly accurate measurement of the rotations of the measuring head within a measuring range of ±5° is required. For this purpose, an angle measuring system for the measurement of the roll, pitch and yaw angle with an interference-based illumination is being developed at PTB.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Gerd Ehret, Armin Zörkler, and Jan Spichtinger "Form measurement of slightly curved surfaces with diameters up to 1.5 meters based on an optical subaperture method", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 1324102 (20 November 2024); https://doi.org/10.1117/12.3037860

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE