Paper
1 December 1990 Study of stresses in optical thin films by optical fiber technology
Shouyao Sun, Jiu Lin Zhou, Xuequan Zan
Author Affiliations +
Abstract
In-situ measuring the intensity and characteristics stresses in optical coatings during deposition can get a lot of important information for improving the properties of optical thin films, which is more important for some devices uesd in modern science and technology. This paper gives a new method which uses a kind of most in-fashion sensing technology, a single-mode optical fiber sensing system developed in the middle of 1900s to test the stresses in optical coatings during deposition with the aid of a single-chip micro-computer and a micro-printer. The experimental results show that this method takes advantages of high sensitivity wide dynamic range, small volume, available in-situ measurement and easily interfaced to any vacuum system.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shouyao Sun, Jiu Lin Zhou, and Xuequan Zan "Study of stresses in optical thin films by optical fiber technology", Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); https://doi.org/10.1117/12.22430
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KEYWORDS
Thin films

Coating

Optical coatings

Optical fibers

Sensing systems

Sensors

Fiber optics sensors

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