Some physical properties and microstructure of titania films doped with multielement

Longsheng Qian; Tongqun Miao; Youxin Yuan; Nai-Hong Wang

doi:10.1117/12.22405

1 December 1990 Some physical properties and microstructure of titania films doped with multielement

Longsheng Qian, Tongqun Miao, Youxin Yuan, Nai-Hong Wang

Proceedings Volume 1323, Optical Thin Films III: New Developments; (1990) https://doi.org/10.1117/12.22405
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The chemical composition, refractive index, texture thermal stability and microstructure of the films, by evaporating T102 mixed with elements of TaO5, YO3, and Mo , at the substrates with temperature of room, 180°c and 250° c, were investigated. The results showed that chemical composition of the films is different corresponding to not only that of materials and substrate temperature but also the manufacturing device. Both thermal stability with respect to crystalline temperature and rnicrostructure were different due to both the substrate temperature and chemical composition of the films/or coating materials.

Citation Download Citation

Longsheng Qian, Tongqun Miao, Youxin Yuan, and Nai-Hong Wang "Some physical properties and microstructure of titania films doped with multielement", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22405

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