Development of repairing technology for nanoimprint templates by multiple patterning technology

Takaharu Nagai; Hisayoshi Watanabe; Hideki Cho

doi:10.1117/12.3034660

12 November 2024 Development of repairing technology for nanoimprint templates by multiple patterning technology

Takaharu Nagai, Hisayoshi Watanabe, Hideki Cho

Author Affiliations +

Proceedings Volume 13216, Photomask Technology 2024; 132161J (2024) https://doi.org/10.1117/12.3034660
Event: SPIE Photomask Technology + EUV Lithography, 2024, Monterey, California, United States

Abstract

Nanoimprint lithography, NIL, has garnered attention as a next-generation semiconductor manufacturing technology because of the advantage of higher resolution to ArF-i lithography and lower cost-of-ownership and power consumption to EUV lithography. Though EB repairing technology for 2X nm NIL templates was demonstrated in the past, resolution, yield and turnaround time of repairing remain significant challenges for sub 20nm feature size. In this work, we propose and evaluate a novel repair technology for NIL templates using multiple patterning techniques. We assessed the repair capability using programmed defects on 19nm line/space (L/S) patterns. Results demonstrate successful repair of a wide range of defects, from edge bumps to 45nm in size. Furthermore, we confirmed no significant impact from overlay errors of ±1nm. This method offers higher resolution and processing capability compared to conventional electron beam (EB) repair techniques, representing a significant step towards realizing sub-20nm defect-free NIL templates.

Conference Presentation

Citation Download Citation

Takaharu Nagai, Hisayoshi Watanabe, and Hideki Cho "Development of repairing technology for nanoimprint templates by multiple patterning technology", Proc. SPIE 13216, Photomask Technology 2024, 132161J (12 November 2024); https://doi.org/10.1117/12.3034660

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE