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An interferometer for the precise measurement of rough surface deformation is described. The interferometer uses a liquid crystal phase only SLM controlled by computer in place of the usual hologram. The panel acts as a kinoform which phase modulates light scattered from the test object. Digital phase shifting techniques are used to measure both the initial phase distribution of light from the object and the phase of the interference fringes which appear when it is stressed. Surface deformations may be measured with a resolution of about 1/30 wavelength. 1 .
Thomas H. Barnes,Mikiya Muramatsu, andKiyofumi Matsuda
"Interferometer using a flexible kinoform implemented with a liquid-crystal panel", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.22162
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Thomas H. Barnes, Mikiya Muramatsu, Kiyofumi Matsuda, "Interferometer using a flexible kinoform implemented with a liquid-crystal panel," Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.22162