CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 13179 > Article
Paper
18 July 2024 Design of optical path and mechanical structure for non-contact confocal scanning imaging system
Ziheng Liu, Hanzhong Liao, Xueping Liu, Wei Yan, Lei Huo, Shengli Mi
Author Affiliations +
Proceedings Volume 13179, International Conference on Optics and Machine Vision (ICOMV 2024); 1317906 (2024) https://doi.org/10.1117/12.3031795
Event: International Conference on Optics and Machine Vision (ICOMV 2024), 2024, Nanchang, China
Abstract
This paper designs a non-contact laser confocal system and its mechanical structure. A relatively simple optical structure was sought to be used while ensuring that the design specifications were accomplished. The article designed the lens set and analyzed its imaging quality using Zemax software. The results show that the focusing dispersion spot diameter of the microfocusing system is less than 3 μm, and the RMS radius is less than 1 μm; the focusing dispersion spot diameter of the detection and acquisition system is less than 15 μm, and the RMS radius is less than 5 μm; and the MTF curves of all subsystems are close to the diffraction limit, which indicates that the optical transmission quality is good. In addition, the mechanical structure of the optical path system is designed in this paper to ensure the compactness and simplicity of the whole system.Finally, it can be seen from the physical experiment and software simulation that the designed confocal optical path system has good optical imaging performance
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Ziheng Liu, Hanzhong Liao, Xueping Liu, Wei Yan, Lei Huo, and Shengli Mi "Design of optical path and mechanical structure for non-contact confocal scanning imaging system", Proc. SPIE 13179, International Conference on Optics and Machine Vision (ICOMV 2024), 1317906 (18 July 2024); https://doi.org/10.1117/12.3031795
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 7 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Imaging systems
Optical design
Lenses
Monochromatic aberrations
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top