Atomic core-level spectroscopy is an invaluable metrological tool in a wide array of fields, from quantum and materials science to semiconductor metrology. When applied to dynamical systems, it enables the measurement of element- and layer-specific dynamics. While such spectroscopy has been applied widely in conjunction with optical excitation of samples, its combination with a high-frequency microwave excitation is less common; in principle, however, this combination enables in operando measurements of devices. Toward this goal, we have developed an instrument that uses an RF frequency comb generator to produce high-frequency microwaves (>60GHz) that are synchronized to a tabletop, high-harmonic generation light source with <1.1ps timing jitter. This system can be used to study, with element-specificity, the switching behavior of devices at their operating frequency as well as the resonant behavior of devices or novel materials and systems. For instance, by applying an external magnetic field and tuning the microwave frequency to the ferromagnetic resonance in magnetic films, we can perform high-frequency x-ray or extreme ultraviolet detected ferromagnetic resonance (XFMR) spectroscopy. As a demonstration, we measure XFMR of three sample systems (permalloy, CoFe, and a Fe/TaOx/Ni multilayer). In the future, we can augment this capability with coherent diffractive imaging to perform high-frequency, resonant spectroscopy with sub-100nm spatial resolution.
|