Beam scanning coherent Fourier scatterometry

S. Soman; S. F. Pereira

doi:10.1117/12.3022937

17 June 2024 Beam scanning coherent Fourier scatterometry

S. Soman, S. F. Pereira

Proceedings Volume 13024, Optical Instrument Science, Technology, and Applications III; 1302408 (2024) https://doi.org/10.1117/12.3022937
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

The significance of precise metrology in various industries, particularly within manufacturing plants, is undeniable, especially as components and devices continue to undergo miniaturization. The emergence of nanomanufacturing further amplifies the necessity for meticulous measurement techniques. Coherent Fourier scatterometry is a non-imaging, model-based, bright-field optical metrology technique used for retrieving complex geometric parameters of nanostructures. However, the scanning time has been a limiting factor in its wider adoption as a commercial metrology tool. To address this limitation, we propose a novel design utilizing a galvo mirror for faster scanning, offering significant improvements in scan speed.

Conference Presentation

Citation Download Citation

S. Soman and S. F. Pereira "Beam scanning coherent Fourier scatterometry", Proc. SPIE 13024, Optical Instrument Science, Technology, and Applications III, 1302408 (17 June 2024); https://doi.org/10.1117/12.3022937

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available