Reliable post-production characterization of TiO2/SiO2 electron-beam optical coatings based on multi-sample photometric and ellipsometric data

Tatiana Amochkina; Michael Trubetskov; Vesna Janicki; Jordi Sancho-Parramon

doi:10.1117/12.3017184

24 June 2024 Reliable post-production characterization of TiO₂/SiO₂ electron-beam optical coatings based on multi-sample photometric and ellipsometric data

Tatiana Amochkina, Michael Trubetskov, Vesna Janicki, Jordi Sancho-Parramon

Author Affiliations +

Proceedings Volume 13020, Advances in Optical Thin Films VIII; 130200S (2024) https://doi.org/10.1117/12.3017184
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

The study focuses on reliable reverse engineering of electron-beam deposited TiO₂/SiO₂ coatings. It is known that optical constants of evaporated TiO₂ films are dependent on deposition conditions and may vary from layer to layer. Also, the nominal optical constants, used during the theoretical designing, may differ from the actual optical constants of coating layers, determined based on characterization of thicker single layers. Typically, post-production characterization of e-beam evaporated coatings is based on spectral photometric or/and ellipsometric data measured ex-situ. The study reports a new reliable algorithm that allows reliable estimation of layer thicknesses and optical constants based on ex-situ measurements. The reliability of the results is verified using a specially produced unique set of samples including single layers identical to the ones included in the multilayer sample. The obtained results, based on the photometric and ellipsometric data, are in correspondence with each other. The algorithm delivers practical results and avoids overfitting.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Tatiana Amochkina, Michael Trubetskov, Vesna Janicki, and Jordi Sancho-Parramon "Reliable post-production characterization of TiO₂/SiO₂ electron-beam optical coatings based on multi-sample photometric and ellipsometric data", Proc. SPIE 13020, Advances in Optical Thin Films VIII, 130200S (24 June 2024); https://doi.org/10.1117/12.3017184

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