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We report on the realization of novel instruments for absolute vapor pressure measurements: (i) a novel vacuum system in which the saturation vapor pressure of low-volatile substances can be measured directly and accurately, (ii) optomechanical “membrane sandwich” squeeze film pressure sensors with enhanced pressure response and pressure sensitivities on a par with those of the best commercial capacitive diaphragm sensors.
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Mohsen Salimi, Robin V. Nielsen, Henrik B. Pedersen, Aurélien R. Dantan, "Novel instruments for absolute vapor pressure measurements," Proc. SPIE 12999, Optical Sensing and Detection VIII, 129992D (6 June 2024); https://doi.org/10.1117/12.3017362