Digital holographic profilometry with volumetric aberration compensation

Moncy Sajeev Idicula; Kai Wen; Michał Józwik; Hyon-Gon Choo; Peng Gao; Tomasz Kozacki

doi:10.1117/12.3022331

18 June 2024 Digital holographic profilometry with volumetric aberration compensation

Moncy Sajeev Idicula, Kai Wen, Michał Józwik, Hyon-Gon Choo, Peng Gao, Tomasz Kozacki

Proceedings Volume 12998, Optics, Photonics, and Digital Technologies for Imaging Applications VIII; 129981K (2024) https://doi.org/10.1117/12.3022331
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Conference Poster

Abstract

Holography has amassed increased attention over time, especially in direct recording using CCD arrays and numerical reconstruction. This surge is particularly notable in 3D imaging techniques like Digital holographic microscopy (DHM), which serves as a non-contact profilometric instrument for revealing the topography of microscopic objects. As for, multiangle digital holographic profilometry (MIDHP) combines DHM and multi-angle interferometry has a good ability to measure the profile of samples and solve the 2π ambiguity problem. Despite significant progress in MIDHP, challenges arise from computation inaccuracies or data deficiencies, especially in the presence of aberrations when acquiring sufficient information of high numerical aperture (NA) samples using the classical compensation method. To address this, we introduce spherical-wave illumination scanning digital holographic profilometry (SWS-DHP), which has proven to be effective in profiling high-NA objects. Since the classical aberration compensation proved inadequate in this case, this paper proposes a new aberration compensation method based on the propagation of object and illumination waves, automatically correcting aberrations within the entire 3D volume of the reconstruction. Our investigation employs a model-based approach, and the accuracy of this new method will be tested numerically and experimentally, particularly on high-NA and high-depth objects.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Moncy Sajeev Idicula, Kai Wen, Michał Józwik, Hyon-Gon Choo, Peng Gao, and Tomasz Kozacki "Digital holographic profilometry with volumetric aberration compensation", Proc. SPIE 12998, Optics, Photonics, and Digital Technologies for Imaging Applications VIII, 129981K (18 June 2024); https://doi.org/10.1117/12.3022331

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available