Multispectral interferometry for characterizing nano-objects

Dariusz Litwin; Kamil Radziak; Adam Czyżewski; Jacek Galas; Tadeusz Kryszczyński; Robert Szumski; Justyna Niedziela

doi:10.1117/12.3017614

18 June 2024 Multispectral interferometry for characterizing nano-objects

Dariusz Litwin, Kamil Radziak, Adam Czyżewski, Jacek Galas, Tadeusz Kryszczyński, Robert Szumski, Justyna Niedziela

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 129970F (2024) https://doi.org/10.1117/12.3017614
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

The paper discusses an alternative approach to the variable wavelength interferometry. The technique is based on specialized composition of two birefringent prisms that are inserted in a classical microscope with the Köhler illumination system. The optical system includes a continuously tuned light source and consists in advanced processing of sequentially recorded images at different wavelengths. The instrument is suitable for both transmitted and reflected-light modes and allows the user to measure optical and geometrical parameters of phase or reflective structures. This paper focuses on the reflected-light mode set-up, and measurements of waveplates and step height standards. The low uncertainty of the optical path difference is obtained by the continuous character of the light source and constitutes a key element of the system. In contrast to some previous presentations on the variable wavelength interferometry this paper demonstrates more profound nature of the phenomenon and a more precise algorithm for the fringe image processing.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Dariusz Litwin, Kamil Radziak, Adam Czyżewski, Jacek Galas, Tadeusz Kryszczyński, Robert Szumski, and Justyna Niedziela "Multispectral interferometry for characterizing nano-objects", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129970F (18 June 2024); https://doi.org/10.1117/12.3017614

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