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18 June 2024 Nanopositioning and nanomeasuring machines: in the footsteps of Albert Michelson and Ernst Abbe
Eberhard Manske
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Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 1299709 (2024) https://doi.org/10.1117/12.3024360
Event: SPIE Photonics Europe, 2024, Strasbourg, France
Abstract
Nanopositioning and Nanomeasuring Machines (NPMM), developed at TU Ilmenau provides high-precision measurement and positioning of objects across 10 decades, from 20 pm resolution up to 200 mm measuring range. They are working on the basis of the error-minimal, extended three dimensional Abbe-comparator principle, with high precision fibre coupled laser interferometers and several optical, tactile and atomic force probes. The proof of the enormous accuracy repeatedly comes up against the limits of the realisation of representational standards. In addition to increasing the frequency stability of He-Ne lasers to 10-12, enormous progress has been made in correcting the refractive index of the laser wavelength. Measurement files of up to 6 TByte can be generated. Further development is moving in the direction of utilising the enormous precision of the machines for AFM tip-based and laser-based nanofabrication. The publication presents measurement and processing results and discusses the enormous possibilities of this new technology.
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Eberhard Manske "Nanopositioning and nanomeasuring machines: in the footsteps of Albert Michelson and Ernst Abbe", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 1299709 (18 June 2024); https://doi.org/10.1117/12.3024360
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KEYWORDS
Quartz
Helium neon lasers
Interferometers
Laser frequency
Laser stabilization
Nanofabrication
Refractive index
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