PROCEEDINGS VOLUME 12954
SPIE ADVANCED LITHOGRAPHY + PATTERNING | 25 FEBRUARY - 1 MARCH 2024
DTCO and Computational Patterning III
Editor(s): Neal V. Lafferty
Editor Affiliations +
Proceedings Volume 12954 is from: Logo
SPIE ADVANCED LITHOGRAPHY + PATTERNING
25 February - 1 March 2024
San Jose, California, United States
Front Matter: Volume 12954
Proceedings Volume DTCO and Computational Patterning III, 1295401 (2024) https://doi.org/10.1117/12.3031866
DTCO and STCO I
Pradeep Nanja, Brett Lowe, Sumant Sarkar
Proceedings Volume DTCO and Computational Patterning III, 1295402 (2024) https://doi.org/10.1117/12.3010192
Proceedings Volume DTCO and Computational Patterning III, 1295403 (2024) https://doi.org/10.1117/12.3010201
Proceedings Volume DTCO and Computational Patterning III, 1295404 (2024) https://doi.org/10.1117/12.3010858
Ryoung-Han Kim, Apoorva Oak, Yasser Sherazi, Gioele Mirabelli, Soobin Hwang, Kiho Yang, Hsinlan Chang
Proceedings Volume DTCO and Computational Patterning III, 1295405 (2024) https://doi.org/10.1117/12.3009888
Proceedings Volume DTCO and Computational Patterning III, 1295406 (2024) https://doi.org/10.1117/12.3023887
DTCO and Computational Patterning Keynote Session
Koki Tsurusaki, Masaharu Kobayashi, Mahoro Yoshida, Akio Koyama
Proceedings Volume DTCO and Computational Patterning III, 1295407 https://doi.org/10.1117/12.3018033
John Kibarian, Tomasz Brozek, Christophe Begue, Ming Zhang
Proceedings Volume DTCO and Computational Patterning III, 1295408 https://doi.org/10.1117/12.3022874
DTCO and STCO II
Halil Kükner, Gioele Mirabelli, Sheng Yang, Yun Zhou, Alexander Makarov, Yang Xiang, Juergen Boemmels, Anabela Veloso, Odysseas Zografos, et al.
Proceedings Volume DTCO and Computational Patterning III, 1295409 (2024) https://doi.org/10.1117/12.3010866
Hsiang-Chih Wen, Soo Han Choi, Antonio Ferrario, David DeMarcos, Pixy Pi, Selwyn Gao, Shirley Xue, Elango Velayutham, Mark Pogers, et al.
Proceedings Volume DTCO and Computational Patterning III, 129540A (2024) https://doi.org/10.1117/12.3009824
Proceedings Volume DTCO and Computational Patterning III, 129540B (2024) https://doi.org/10.1117/12.3010937
Proceedings Volume DTCO and Computational Patterning III, 129540C (2024) https://doi.org/10.1117/12.3012028
3DIC, Heterogeneous Integration
Proceedings Volume DTCO and Computational Patterning III, 129540D (2024) https://doi.org/10.1117/12.3010045
Proceedings Volume DTCO and Computational Patterning III, 129540E (2024) https://doi.org/10.1117/12.3010149
Machine Learning I
Proceedings Volume DTCO and Computational Patterning III, 129540F (2024) https://doi.org/10.1117/12.3011296
Proceedings Volume DTCO and Computational Patterning III, 129540G (2024) https://doi.org/10.1117/12.3010292
Ferhat Turker Celepcikay, Chun-Cheng Liao, Teng-Yen Huang, Szu-Ping Chen, Chi Neng Lin, Alan Zhu, Hung Yu Lin
Proceedings Volume DTCO and Computational Patterning III, 129540H (2024) https://doi.org/10.1117/12.3010902
Computational Patterning I
Proceedings Volume DTCO and Computational Patterning III, 129540I (2024) https://doi.org/10.1117/12.3009880
Proceedings Volume DTCO and Computational Patterning III, 129540J (2024) https://doi.org/10.1117/12.3009980
Yuan Gan, Changlian Yan, Mengqing Yu, Penghui Zhu, Jing Qiao, Lile Lu, Shengrui Zhang, Ming Ding, Chunying Han, et al.
Proceedings Volume DTCO and Computational Patterning III, 129540K (2024) https://doi.org/10.1117/12.3010034
Proceedings Volume DTCO and Computational Patterning III, 129540L (2024) https://doi.org/10.1117/12.3010127
Zhixin Wang, Li Wang, Harun H. Solak
Proceedings Volume DTCO and Computational Patterning III, 129540M (2024) https://doi.org/10.1117/12.3010197
Enas Sakr, Zac Levinson, Rob DeLancey, C. Jay Lee, Jinguang Li, Ryan Chen, Robert Iwanow, Delian Yang, Wolfgang Hoppe, et al.
Proceedings Volume DTCO and Computational Patterning III, 129540N (2024) https://doi.org/10.1117/12.3013089
Pascal Gilgenkrantz, Bassem Riad, Maram Salah, Azim Siddique
Proceedings Volume DTCO and Computational Patterning III, 129540O (2024) https://doi.org/10.1117/12.3010142
Mohamed Gheith
Proceedings Volume DTCO and Computational Patterning III, 129540P https://doi.org/10.1117/12.3025295
Computational Patterning and Machine Learning
Weilun Chiu, Tony Hu, Terry Hsuan, Elvis Yang, T. H. Yang, K. C. Chen
Proceedings Volume DTCO and Computational Patterning III, 129540Q (2024) https://doi.org/10.1117/12.3008955
Proceedings Volume DTCO and Computational Patterning III, 129540R (2024) https://doi.org/10.1117/12.3008988
Elizabeth Grubbs, Bernd Kuechler, Hyesook Hong, Enas Sakr, Lena Zavyalova, Folarin Latinwo, Delian Yang, Linghui Wu, Yan Feng, et al.
Proceedings Volume DTCO and Computational Patterning III, 129540S (2024) https://doi.org/10.1117/12.3013125
Ping Digaum, Kazuto Kajiwara, Nobue Kosa, Ming-Chuan Yang, Ezequiel Vidal Russell, Jianhong Qiu, Omar Ndiaye, Nicolas Martin, Hesham Omar, et al.
Proceedings Volume DTCO and Computational Patterning III, 129540T (2024) https://doi.org/10.1117/12.3009981
Computational Patterning II
Proceedings Volume DTCO and Computational Patterning III, 129540V (2024) https://doi.org/10.1117/12.3012806
Shibing Wang, Yixiao Zhang, Jiechang Hou, Yuansheng Ma, Daman Khaira, Germain Fenger, Yuyang Sun, Bassem Hamieh, Boaz Alperson, et al.
Proceedings Volume DTCO and Computational Patterning III, 129540W https://doi.org/10.1117/12.3010510
Soobin Hwang, Werner Gillijns, Stefan de Gendt, Ryoung-han Kim
Proceedings Volume DTCO and Computational Patterning III, 129540X (2024) https://doi.org/10.1117/12.3010869
Merlin Moreau, Jean-Baptiste Henry, Stéphane Bonnet
Proceedings Volume DTCO and Computational Patterning III, 129540Y (2024) https://doi.org/10.1117/12.3009759
Proceedings Volume DTCO and Computational Patterning III, 129540Z (2024) https://doi.org/10.1117/12.3009839
DFM and DFY
Namjae Kim, Jae-Hyun Kang, SangWoo Jung, DaeHyun Jang, ByungMoo Kim, JoongWon Jeon, Ja-Hum Ku, Kareem Madkour, Joe Kwan
Proceedings Volume DTCO and Computational Patterning III, 1295411 (2024) https://doi.org/10.1117/12.3009798
Proceedings Volume DTCO and Computational Patterning III, 1295412 (2024) https://doi.org/10.1117/12.3010460
Curvilinear Mask Data for Computational Patterning
Proceedings Volume DTCO and Computational Patterning III, 1295413 https://doi.org/10.1117/12.3014637
Kelsey Wooley, Maryvonne Chalony, Andrew M. C. Dawes, Zhixin Wang, Harun H. Solak, Lawrence S. Melvin III
Proceedings Volume DTCO and Computational Patterning III, 1295414 (2024) https://doi.org/10.1117/12.3014541
Proceedings Volume DTCO and Computational Patterning III, 1295416 (2024) https://doi.org/10.1117/12.3014640
Proceedings Volume DTCO and Computational Patterning III, 1295417 (2024) https://doi.org/10.1117/12.3011100
Proceedings Volume DTCO and Computational Patterning III, 1295418 (2024) https://doi.org/10.1117/12.3010562
Poster Session
Proceedings Volume DTCO and Computational Patterning III, 1295419 (2024) https://doi.org/10.1117/12.3008958
Jiashuo Wang, Xiaojing Su, Yayi Wei
Proceedings Volume DTCO and Computational Patterning III, 129541A (2024) https://doi.org/10.1117/12.3009886
Tsung-Wei Lin, Hung-Yu Lin, Meng-Shiun Chiang, Jung-Kuan Huang, Jason Sweis, Philippe Hurat, Chung-Chen Hsu, Chun-Sheng Wu, Chao-Yi Huang, et al.
Proceedings Volume DTCO and Computational Patterning III, 129541B (2024) https://doi.org/10.1117/12.3009892
Proceedings Volume DTCO and Computational Patterning III, 129541C (2024) https://doi.org/10.1117/12.3010111
Qingpeng Wang, Yu Jia Zhong, Timothy Yang, Lifei Sun, Pengfei Lyu, Benjamin Vincent, Ivan Chakarov, Joseph Ervin
Proceedings Volume DTCO and Computational Patterning III, 129541D (2024) https://doi.org/10.1117/12.3010206
Po-Hsun Fang, Peichen Yu
Proceedings Volume DTCO and Computational Patterning III, 129541E (2024) https://doi.org/10.1117/12.3007748
Wenrui Wang, Hua Shao, Rui Chen, Yayi Wei
Proceedings Volume DTCO and Computational Patterning III, 129541F (2024) https://doi.org/10.1117/12.3010574
Digital Poster Session
Yujia Zhong, Qingpeng Wang, Dempsey Deng, Benjamin Vincent, Joseph Ervin
Proceedings Volume DTCO and Computational Patterning III, 129541G (2024) https://doi.org/10.1117/12.3010213
Zhengguo Tian, Yayi Wei, Yajuan Su, Libin Zhang, Lisong Dong, Le Ma
Proceedings Volume DTCO and Computational Patterning III, 129541H (2024) https://doi.org/10.1117/12.3009964
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