Wavefront calibration and multi-configurable measurements

Pengfei Wu; Will Zhou; Lucy Chu; Sean Huentelman

doi:10.1117/12.3018446

13 March 2024 Wavefront calibration and multi-configurable measurements

Pengfei Wu, Will Zhou, Lucy Chu, Sean Huentelman

Proceedings Volume 12909, Ultra-High-Definition Imaging Systems VII; 129090P (2024) https://doi.org/10.1117/12.3018446
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

A single optical system with features of both automatic calibration and multiple configurations has been developed for high-resolution wavefront measurements. With the configuration of fine measurements, the tester can scan a large area to obtain mapping data with detailed local wavefront information of the sample. The tester can also take a fast snapshot of wavefront measurement by using the configuration of coarse measurements.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Pengfei Wu, Will Zhou, Lucy Chu, and Sean Huentelman "Wavefront calibration and multi-configurable measurements", Proc. SPIE 12909, Ultra-High-Definition Imaging Systems VII, 129090P (13 March 2024); https://doi.org/10.1117/12.3018446

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