Optimizing a micro electro mechanical system (MEMS) based phase-only light modulator (PLM) for improved system performance

Taylor Byrum; Kristofer Oberascher; Zachary Walker; Alex Lyubarsky; Sam Martin; Griffin Orr; William McDonald; Nathan Gilly; Sean O'Brien; Kelly Taylor; Wesley Hamlin; Patrick Oden; James Hall

doi:10.1117/12.3003885

13 March 2024 Optimizing a micro electro mechanical system (MEMS) based phase-only light modulator (PLM) for improved system performance

Taylor Byrum, Kristofer Oberascher, Zachary Walker, Alex Lyubarsky, Sam Martin, Griffin Orr, William McDonald, Nathan Gilly, Sean O'Brien, Kelly Taylor, Wesley Hamlin, Patrick Oden, James Hall

Author Affiliations +

Proceedings Volume 12900, Emerging Digital Micromirror Device Based Systems and Applications XVI; 129000D (2024) https://doi.org/10.1117/12.3003885
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

The Phase-Only Spatial Light Modulator (PLM) is a piston-mode design of the Digital Micromirror Device (DMD) that Texas Instruments DLP® Products has been developing in recent years. While the manufacturing of the PLM shares many of the same process steps of the traditional DMD, the optical system integration of the two devices are fundamentally different. As a result, new optimization is needed to maximize the performance of the PLM based on the device characteristics. This paper covers the optimization of key pixel parameters – array fill factor, mirror flatness, mirror tilt – and generally how the parameters affect a device performance metric we call Zeroth-Order Efficiency. The various improvements are modeled to ascertain expected performance gains and at what point the performance benefits achieve asymptotic behavior. Theoretical and empirical results are shown for the improved key pixel parameters and their corresponding gains made to Zeroth-Order Efficiency.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Taylor Byrum, Kristofer Oberascher, Zachary Walker, Alex Lyubarsky, Sam Martin, Griffin Orr, William McDonald, Nathan Gilly, Sean O'Brien, Kelly Taylor, Wesley Hamlin, Patrick Oden, and James Hall "Optimizing a micro electro mechanical system (MEMS) based phase-only light modulator (PLM) for improved system performance", Proc. SPIE 12900, Emerging Digital Micromirror Device Based Systems and Applications XVI, 129000D (13 March 2024); https://doi.org/10.1117/12.3003885

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available