SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors

Doris K. T. Ng; Weiguo Chen; Linfang Xu; Harmony J. E. Lau; Landobasa Y. M. Tobing; Chong Pei Ho; Wing Wai Chung; Norhanani Jaafar; Hanfeng Fu; Qingxin Zhang

doi:10.1117/12.3002138

12 March 2024 SF₆ mixed in N₂ gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors

Doris K. T. Ng, Weiguo Chen, Linfang Xu, Harmony J. E. Lau, Landobasa Y. M. Tobing, Chong Pei Ho, Wing Wai Chung, Norhanani Jaafar, Hanfeng Fu, Qingxin Zhang

Author Affiliations +

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 128990J (2024) https://doi.org/10.1117/12.3002138
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

SF₆ gas sensor is developed to measure SF₆ gas at different concentrations mixed with N2 based on mid-IR absorption of SF₆ at a wavelength of ~10.6 μm. An optical bandpass filter of ~10.6 μm is put in front of a thermal emitter source to allow light of this wavelength to pass through. A CMOS compatible pyroelectric detector is put on the other end of the gas channel to measure the voltage change due to presence of SF₆ gas. Here, we use AlN-based and 12% ScAlN-based pyroelectric detectors respectively. The results show for 100% SF₆ gas sensing, 12% ScAlN-based pyroelectric detector gives ~73% higher response compared to when using AlN-based pyroelectric detector. The voltage drop between reference N₂ gas and different SF₆ gas concentrations is also higher (up to 2x) when using 12% ScAlN-based pyroelectric detector. Based on the measured SF₆ gas responses, we try to estimate the lower limit of detection of our gas sensors when using AlN- and ScAlN- based pyroelectric detectors respectively. Response times taken for both detectors to detect SF₆ concentrations are measured to be ~6.26 s for AlN-based pyroelectric detector and ~1.99 s for 12% ScAlNbased pyroelectric detector. Finally, both pyroelectric detectors’ electrical responses across different frequencies are measured and their 3-dB frequency cutoffs are extracted to be ~13.5 Hz and ~12.6 Hz for AlN- and 12% ScAlN- based pyroelectric detector respectively. The results provide more understanding on characteristics of pyroelectric detectors in SF₆ greenhouse gas sensing based on mid-IR absorption.

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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Doris K. T. Ng, Weiguo Chen, Linfang Xu, Harmony J. E. Lau, Landobasa Y. M. Tobing, Chong Pei Ho, Wing Wai Chung, Norhanani Jaafar, Hanfeng Fu, and Qingxin Zhang "SF₆ mixed in N₂ gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 128990J (12 March 2024); https://doi.org/10.1117/12.3002138

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