Electric-field poling of a silicon nitride microring resonator for linear electro-optic modulation

Boris Zabelich; Edgars Nitiss; Christian Lafforgue; Anton Stroganov; Camille-Sophie Brès

doi:10.1117/12.3001820

12 March 2024 Electric-field poling of a silicon nitride microring resonator for linear electro-optic modulation

Boris Zabelich, Edgars Nitiss, Christian Lafforgue, Anton Stroganov, Camille-Sophie Brès

Proceedings Volume 12889, Integrated Optics: Devices, Materials, and Technologies XXVIII; 1288907 (2024) https://doi.org/10.1117/12.3001820
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

The centrosymmetric structure of stoichiometric silicon nitride inhibits the realization of second-order nonlinear processes in this low-loss, complementary-metal-oxide-semiconductor fabrication-compatible platform. Nevertheless, linear electro-optic modulation is an essential functionality desired for implementation in photonic integrated circuits. This study presents the successful achievement of electro-optical modulation in a silicon nitride microring resonator, employing thermally assisted electric-field poling. With an inscribed electric field of 100 V/μm within the silicon nitride waveguide, an effective second-order susceptibility of 0.45 pm/V is induced. Leveraging silicon nitride as the active material for electro-optic modulation, we determined the operational bandwidth of the device, constrained by the electrode design, to be 78 MHz. Furthermore, we demonstrate the capability of the device to modulate data at bitrates of up to 75 Mb/s. Our findings highlight the potential of linear electro-optical modulation in the silicon nitride integrated platform.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Boris Zabelich, Edgars Nitiss, Christian Lafforgue, Anton Stroganov, and Camille-Sophie Brès "Electric-field poling of a silicon nitride microring resonator for linear electro-optic modulation", Proc. SPIE 12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, 1288907 (12 March 2024); https://doi.org/10.1117/12.3001820

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available