A high-frequency surface-micromachined optical ultrasound transducer (SMOUT) array for 3D micro photoacoustic computed tomography (µPACT)

Zhiyu Yan; Jun Zou

doi:10.1117/12.3000769

12 March 2024 A high-frequency surface-micromachined optical ultrasound transducer (SMOUT) array for 3D micro photoacoustic computed tomography (μPACT)

Zhiyu Yan, Jun Zou

Author Affiliations +

Proceedings Volume 12842, Photons Plus Ultrasound: Imaging and Sensing 2024; 1284204 (2024) https://doi.org/10.1117/12.3000769
Event: SPIE BiOS, 2024, San Francisco, California, United States

Abstract

This letter reports a 2D high-frequency surface-micromachined optical ultrasound transducer (HF-SMOUT) array for micro-PACT (μPACT) applications. A 11 mm × 11 mm HF-SMOUT array with 220 × 220 elements (35 μm in diameter) is designed, fabricated and characterized. The center frequency and bandwidth of the HF-SMOUT elements are ~15 MHz and ~20 MHz (133%), respectively. The noise equivalent pressure (NEP) is 156 Pa (or 19 mPa/√ Hz) within a measurement bandwidth of 5 × 75 MHz. PACT experiments are conducted to evaluate the imaging performances of the SMOUT array. Spatial resolution is estimated as 90 μm (axial) and 250—750 μm (lateral) within a 10 × 10 mm􀬶 FOV (field of view) and the imaging depth up to 16 mm. 3D PA image of a knotted human hair target is also successfully acquired. These results show the feasibility of using the HF-SMOUT array for μPACT applications.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zhiyu Yan and Jun Zou "A high-frequency surface-micromachined optical ultrasound transducer (SMOUT) array for 3D micro photoacoustic computed tomography (μPACT)", Proc. SPIE 12842, Photons Plus Ultrasound: Imaging and Sensing 2024, 1284204 (12 March 2024); https://doi.org/10.1117/12.3000769

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