Heterodyne lateral shearing interferometer for measuring the form and mid-spatial frequency of aspheric test surfaces

Eric Goodwin; Goldie Goldstein; Kei Itoh; Atsushi Kagiwada; Toyama Kiyoshi

doi:10.1117/12.2692550

15 May 2024 Heterodyne lateral shearing interferometer for measuring the form and mid-spatial frequency of aspheric test surfaces

Eric Goodwin, Goldie Goldstein, Kei Itoh, Atsushi Kagiwada, Toyama Kiyoshi

Author Affiliations +

Proceedings Volume 12798, International Optical Design Conference 2023; 127982P (2024) https://doi.org/10.1117/12.2692550
Event: International Optical Design Conference 2023, 2023, Quebec City, QC, Canada

Abstract

We demonstrate a spatial shearing, heterodyne interferometer for measuring aspheres with high dynamic range, high sensitivity, and low susceptibility to environmental fluctuations. Form and mid-spatial frequency are measured rapidly and accurately without a null.

Citation Download Citation

Eric Goodwin, Goldie Goldstein, Kei Itoh, Atsushi Kagiwada, and Toyama Kiyoshi "Heterodyne lateral shearing interferometer for measuring the form and mid-spatial frequency of aspheric test surfaces ", Proc. SPIE 12798, International Optical Design Conference 2023, 127982P (15 May 2024); https://doi.org/10.1117/12.2692550

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