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In order to solve the problem that the laser confocal vibration measurement method is susceptible to noise and interference signals. This paper proposes a laser confocal vibration signal processing method based on wavelet denoising. By using wavelet transform to denoise the laser confocal vibration signal, this method effectively eliminates noise and interference signals. The experiment shows that the use of wavelet transform can effectively improve the test results of laser confocal vibration measurement, achieving a measurement bandwidth of 100MHz and a nanometer-level amplitude resolution. This method provides ideas for expanding the application of the laser confocal vibration measurement in complex scenes.
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Demin Xu, Yuebo Wu, Lirong Qiu, Ke-Mi Xu, Weiqian Zhao, "A laser confocal vibration signal processing method based on wavelet transform," Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 1276919 (29 November 2023); https://doi.org/10.1117/12.2686959