Electron beam-generated plasmas in NF3 environments for the passivation of UV/O/IR mirrors

L. V. Rodriguez de Marcos; D. R. Boris; V. D. Wheeler; M. F. Batkis; J. G. Del Hoyo; E. N. Jin; S. G. Walton; E. J. Wollack; M. A. Quijada

doi:10.1117/12.2678016

4 October 2023 Electron beam-generated plasmas in NF₃ environments for the passivation of UV/O/IR mirrors

L. V. Rodriguez de Marcos, D. R. Boris, V. D. Wheeler, M. F. Batkis, J. G. Del Hoyo, E. N. Jin, S. G. Walton, E. J. Wollack, M. A. Quijada

Author Affiliations +

Proceedings Volume 12676, UV/Optical/IR Space Telescopes and Instruments: Innovative Technologies and Concepts XI; 126760F (2023) https://doi.org/10.1117/12.2678016
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

In previous work we demonstrated the feasibility of a new plasma process based on electron beam-generated plasmas in SF₆ environments that effectively passivates the surface of aluminum mirror samples for applications in the UV/O/IR (ultraviolet/optical/infrared) by removing the native oxide layer and producing an AlF₃ passivation layer with tunable thickness. This process provides good results in terms of far ultraviolet reflectivity, environmental stability, uniformity, polarization aberration, surface roughness, and does not require elevated substrate temperatures or ultra-high vacuum conditions. In this communication we show that, in addition to these characteristics, Al mirrors can be passivated faster with NF₃ than with SF₆ over a wide range of process parameters without the loss of optical performance independent of the working-gas choice adopted for the plasma.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

L. V. Rodriguez de Marcos, D. R. Boris, V. D. Wheeler, M. F. Batkis, J. G. Del Hoyo, E. N. Jin, S. G. Walton, E. J. Wollack, and M. A. Quijada "Electron beam-generated plasmas in NF₃ environments for the passivation of UV/O/IR mirrors", Proc. SPIE 12676, UV/Optical/IR Space Telescopes and Instruments: Innovative Technologies and Concepts XI, 126760F (4 October 2023); https://doi.org/10.1117/12.2678016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available