Light scattering method: inspection of diamond turning process

Haiming Wang; Hangyu Mi

doi:10.1117/12.20273

1 August 1990 Light-scattering method: inspection of diamond-turning process

Haiming Wang, Hangyu Mi

Proceedings Volume 1266, In-Process Optical Measurements and Industrial Methods; (1990) https://doi.org/10.1117/12.20273
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

A novel method for simultaneously measuring of form and roughness of the diamond turned surfaces has been developed. A laser beam has been applied to scan the surface under test the scattering patterns have been received by a CCD array with 2048 sensor elements the deviation of the specular reflection gives the information of the surface slope which can be integrated to yield the surface form. The surface roughness is described by scattering pattern. Furthermore the scattering patterns can also be used to diagnose the working conditions of the machine which is used to manufacture the optical surface under test. Finally some factors which have influences on the light scattering method have also been discussed. I .

Citation Download Citation

Haiming Wang and Hangyu Mi "Light-scattering method: inspection of diamond-turning process", Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); https://doi.org/10.1117/12.20273

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