UV-LED-based projection lithography for rapid high-resolution micro- and nanostructuring

Lei Zheng; Carsten Reinhardt; Bernhard Roth

doi:10.1117/12.2677495

3 October 2023 UV-LED-based projection lithography for rapid high-resolution micro- and nanostructuring

Lei Zheng, Carsten Reinhardt, Bernhard Roth

Proceedings Volume 12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX; 1265305 (2023) https://doi.org/10.1117/12.2677495
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

The demand on the miniaturization of products has fostered the advancement of high-resolution fabrication technologies. Here, we demonstrate a simple and low-cost UV-LED-based lithography technique for structuring at micro- and nanoscale. The corresponding experimental setup was established with off-the-shelf components and allows for single structuring within seconds based on a standard microscope projection photolithography (MPP) process. Single lines with feature sizes down to 150 nm were successfully produced. In addition, high-resolution gratings, ring resonators as well as arrayed waveguide gratings at the micro- and nanoscale were successfully fabricated as well. This operation-friendly, highly efficient and low-cost approach exhibits great potential in micro- and nanomanufacturing for applications in fields such as nanophotonics, biophotonics and micro- and nanoelectromechanical systems.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lei Zheng, Carsten Reinhardt, and Bernhard Roth "UV-LED-based projection lithography for rapid high-resolution micro- and nanostructuring", Proc. SPIE 12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX, 1265305 (3 October 2023); https://doi.org/10.1117/12.2677495

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