Dynamic accuracy method of laser imaging system based on MEMS mirror

Jun Zhang; Li Yang; Huimin Chen

doi:10.1117/12.2675130

25 May 2023 Dynamic accuracy method of laser imaging system based on MEMS mirror

Jun Zhang, Li Yang, Huimin Chen

Proceedings Volume 12636, Third International Conference on Machine Learning and Computer Application (ICMLCA 2022); 126361K (2023) https://doi.org/10.1117/12.2675130
Event: Third International Conference on Machine Learning and Computer Application (ICMLCA 2022), 2022, Shenyang, China

Abstract

As one of the important ways of laser imaging, Microelectromechanical system (MEMS)-based mirror imaging has the advantages of small volume and high frequency. In this paper, the relationship between key parameters of MEMS mirrors is studied. Also, the realization method of scanning imaging based on a one-dimensional MEMS mirror is studied. A method of controlling the number of scanning harnesses based on a MEMS mirror is proposed. The single-lens method is used to design and collimate the transmitting optical system with Zemax simulation software, and the effects of the different numbers of scanning wire harnesses are simulated. The result shows that the number of scanning wire harnesses can be controlled, indicating that the system's dynamic accuracy can be achieved.

Citation Download Citation

Jun Zhang, Li Yang, and Huimin Chen "Dynamic accuracy method of laser imaging system based on MEMS mirror", Proc. SPIE 12636, Third International Conference on Machine Learning and Computer Application (ICMLCA 2022), 126361K (25 May 2023); https://doi.org/10.1117/12.2675130

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