Design of dispersive objective lens for spectral confocal displacement sensor based on GRIN lens

Chunyan Li; Ke Li; JiHong Liu; Zheng Lv; Gengpeng Li; Dou Luo

doi:10.1117/12.2651399

20 January 2023 Design of dispersive objective lens for spectral confocal displacement sensor based on GRIN lens

Chunyan Li, Ke Li, JiHong Liu, Zheng Lv, Gengpeng Li, Dou Luo

Author Affiliations +

Proceedings Volume 12558, AOPC 2022: Optical Spectroscopy and Imaging; 125580A (2023) https://doi.org/10.1117/12.2651399
Event: Applied Optics and Photonics China 2022 (AOPC2022), 2022, Beijing, China

Abstract

Spectral confocal technology uses chromatic aberration which is generated by a dispersion lens to detect surface shape. The axial dispersion generated by the dispersion lens will affect the measurement range of the whole spectral confocal displacement sensor. The refractive index of an axial GRIN (gradient index, GRIN) lens varies non-homogeneous along the axial direction and is constantly perpendicular to an optical axis of the plane. The paper explored the design of a dispersive objective lens for a spectral confocal displacement sensor based on the GRIN lens. Firstly, the optical power and axial dispersion models of the GRIN lens are established. The axial dispersion can be realized by focusing the light of different wavelengths at different positions of the optical axis. Secondly, based on the optic power and dispersion function of the GRIN lens, the refractive index distribution of the GRIN lens and the simulation design of the dispersive objective lens is obtained by using MATLAB and ZEMAX software respectively. Finally, the GRIN dispersive objective lens is optimized by setting different merit function operands. The experimental results show that the axial GRIN lens can achieve a focal shift of 1130μm within the wavelength range from 486nm to 656nm. Moreover, the linearity of the lens behaves well. All the blur spot is much smaller than the airy spot. The lens has well-focused as well as high-precision. The research results provide a reference and theoretical basis for the application of the GRIN lens in spectral confocal technology.

Citation Download Citation

Chunyan Li, Ke Li, JiHong Liu, Zheng Lv, Gengpeng Li, and Dou Luo "Design of dispersive objective lens for spectral confocal displacement sensor based on GRIN lens", Proc. SPIE 12558, AOPC 2022: Optical Spectroscopy and Imaging, 125580A (20 January 2023); https://doi.org/10.1117/12.2651399

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KEYWORDS

GRIN lenses

Confocal microscopy

Objectives

Sensors

Refractive index

Lens design

Precision measurement

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