Bimorph mirror processing and fabrication research

Debo Yuan; Guobin Zhang

doi:10.1117/12.2655760

9 January 2023 Bimorph mirror processing and fabrication research

Debo Yuan, Guobin Zhang

Proceedings Volume 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022); 125071H (2023) https://doi.org/10.1117/12.2655760
Event: 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 2022, Changchun, China

Abstract

The beamline optical system in the fourth generation synchrotron radiation light source and free-electron laser facilities puts forward harsh requirements on the performance of optical components, among which, the bimorph mirror is an adaptive optical component designed to meet the ultra-high surface shape progress regulation of the component and the wavefront compensation of the beamline. Domestic design and processing of bimorph mirror technology is still in urgent need of technical breakthroughs. To address this issue, we have studied the fabrication process of bimorph mirror, analyzed the design of the brake unit size in the bimorph mirror and the influence of the mirror clamp support method on the deformation process.

Citation Download Citation

Debo Yuan and Guobin Zhang "Bimorph mirror processing and fabrication research", Proc. SPIE 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 125071H (9 January 2023); https://doi.org/10.1117/12.2655760

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