Passivation of InSb photodetectors with atomic layer deposited Al2O3

Ailiang Cui; Xubo Zhu; Zhenming Ji; Peng Wei; Yanqiu Lv

doi:10.1117/12.2665588

31 January 2023 Passivation of InSb photodetectors with atomic layer deposited Al₂O₃

Ailiang Cui, Xubo Zhu, Zhenming Ji, Peng Wei, Yanqiu Lv

Proceedings Volume 12505, Earth and Space: From Infrared to Terahertz (ESIT 2022); 125050S (2023) https://doi.org/10.1117/12.2665588
Event: Earth and Space: From Infrared to Terahertz (ESIT 2022), 2022, Nantong, China

Abstract

The preparation of surface passivation layers on InSb is essential in the process of device fabrication. An Al₂O₃ passivation film was deposited on the surface of medium wave InSb film by atomic layer deposition (ALD). A series of variable area photodiode devices with different P/A ratios were fabricated. The performance of the device is characterized at 77K. The effects of ALD Al₂O₃ and anodic oxidation on the leakage current of diode devices were investigated. The surface leakage current of the passivated photodetectors was reduced by an order of magnitude over the anode sulfidation passivated photodetectors. Moreover, the metal-insulator-semiconductor (MIS) device were developed respectively, and the effects of different films as a dielectric layer on the interfacial characteristics were investigated.

Citation Download Citation

Ailiang Cui, Xubo Zhu, Zhenming Ji, Peng Wei, and Yanqiu Lv "Passivation of InSb photodetectors with atomic layer deposited Al₂O₃", Proc. SPIE 12505, Earth and Space: From Infrared to Terahertz (ESIT 2022), 125050S (31 January 2023); https://doi.org/10.1117/12.2665588

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available