A study of HgCdTe HOT MW infrared detector

BiSong Tan; KeJun Li; JiangWei Yan; Yu Du; JianHong Mao; TianQing Chen; ChengPan Peng

doi:10.1117/12.2665301

31 January 2023 A study of HgCdTe HOT MW infrared detector

BiSong Tan, KeJun Li, JiangWei Yan, Yu Du, JianHong Mao, TianQing Chen, ChengPan Peng

Proceedings Volume 12505, Earth and Space: From Infrared to Terahertz (ESIT 2022); 125050D (2023) https://doi.org/10.1117/12.2665301
Event: Earth and Space: From Infrared to Terahertz (ESIT 2022), 2022, Nantong, China

Abstract

In this paper, we report the mid-wavelength HgCdTe HOT (High Operating Temperature) detector with 640×512 array and center distance of 15μm by JueXin Microelectronics Co., Ltd. The detector can work steadily when the focal plane array temperature is 140K. We grew up the CdZnTe substrates by vertical Bridgman technique and HgCdTe materials by liquid phase epitaxy process, then the planar n+-on-p diodes were formed by boron ion implantation. Through the optimization of material growth and device fabrication process, the dark current of the device is reduced. At 140K, the cut-off wavelength of the device is 4.7μm, the dark current density reaches 3×10-7A/cm2, and the dark current density of the device is close to that of P-on-N (rule 07). At the focal plane operating temperature of 140K, the operability of the detector can reach more than 99.5%, the NETD is less than 13mK, and the RFPN is less than 0.6mV (close to temporal noise). At the same low temperature, when the operating temperature of the device changes from 80K to 140K, the power consumption of the detector module is reduced by 37% and the cooling time is shortened by 36%.

Citation Download Citation

BiSong Tan, KeJun Li, JiangWei Yan, Yu Du, JianHong Mao, TianQing Chen, and ChengPan Peng "A study of HgCdTe HOT MW infrared detector", Proc. SPIE 12505, Earth and Space: From Infrared to Terahertz (ESIT 2022), 125050D (31 January 2023); https://doi.org/10.1117/12.2665301

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available