Novel approach to solving systematic pattern yield limiters with volume scan diagnosis

Matthew Knowles; Jayant D'Souza; Manish Sharma; Hans Eisenmann; Thomas Zanon

doi:10.1117/12.2658022

30 April 2023 Novel approach to solving systematic pattern yield limiters with volume scan diagnosis

Matthew Knowles, Jayant D'Souza, Manish Sharma, Hans Eisenmann, Thomas Zanon

Proceedings Volume 12495, DTCO and Computational Patterning II; 1249513 (2023) https://doi.org/10.1117/12.2658022
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

After large yield limiters are addressed during ramp, subtle layout pattern systematics continue to cause physical defects and prevent achieving entitlement throughout volume production of semiconductors. Current approaches are insufficient and require layout and location specific fallout information to further inform the pattern analysis engine. In this presentation we will describe a new approach to combine a pattern analysis engine (FIRE from PDF Solutions) with volume logic scan diagnosis (RCD from Siemens). The resulting yield Paretos include specific layout pattern systematic families as distinct root causes and show an overall increase in defect Pareto accuracy from ~70% to ~90%.

Conference Presentation

Citation Download Citation

Matthew Knowles, Jayant D'Souza, Manish Sharma, Hans Eisenmann, and Thomas Zanon "Novel approach to solving systematic pattern yield limiters with volume scan diagnosis", Proc. SPIE 12495, DTCO and Computational Patterning II, 1249513 (30 April 2023); https://doi.org/10.1117/12.2658022

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