Open Access Presentation
30 April 2023 Accelerated computing for silicon leadership
Author Affiliations +
Abstract
It is well known that the computations required to manufacture semiconductors have been increasing exponentially. Optical Proximity Correction has so far consumed the largest share of a fab’s compute cycles, but other kinds of calculations, for example during inline inspection, have also been growing steadily. With the relentless march of technology nodes, we have had to squeeze increasingly complex Physics into a limited compute envelope, due to which simplifying assumptions made for one technology node tend to become invalid at the next node. Accelerated computing solves this problem in two different ways – by drastically reducing the cycle time for increasingly complex calculations, and by freeing up the compute envelope to allow the incorporation of previously prohibitive physical effects or compensation. The other trend that is sweeping all manner of computations in the world today – from search to scientific simulation – is the increasing reliance on AI, and silicon manufacturing is no exception. This talk will describe these larger trends towards Accelerated Computing and give examples of how its use in silicon manufacturing will likely be required for the fastest time to market.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vivek K. Singh "Accelerated computing for silicon leadership", Proc. SPIE 12495, DTCO and Computational Patterning II, 1249502 (30 April 2023); https://doi.org/10.1117/12.2669884
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